A product that detects defects in environments where series-connected heaters are used in semiconductor equipment.
Detects defective heaters in real time, blinks the LED, and generates an alarm in the monitoring system.
- Serial connection heater failure detection device
- Network real-time monitoring
- Heater current can be used for 0.2A or more
- Quick check for defective series heaters (LightBug flashes at defective heater location)
- Parallel connection heaters available
- Main interface + sensor power, communication -
- Heater failure detection sensor board -
- System connection structure -